Amorphous silicon as hydrogen glass

Hydrogen effusion from tritiated amorphous silicon

Thermal Desorption Spectroscopy of Hydrogen from Amorphous Hydrogenated Silicon

T h e r m a l desorption spectroscopy (TDS) based on the mass spectroscopy of thermal ly evolved hydrogen is used for desorption analysis of amorphous hydrogenated silicon (a-Si:H). Two series of glow discharge chemical vapour deposited a-Si:H were investigated by the T D S method . Cons tan t t e m p e r a t u r e growth ra te enabled to determine t empera tu re regions of hydrogen evolution a...

Improved amorphous/crystalline silicon interface passivation by hydrogen plasma treatment

plasma treatment A. Descoeudres, L. Barraud, Stefaan De Wolf, B. Strahm, D. Lachenal, C. Guérin, Z. C. Holman, F. Zicarelli, B. Demaurex, J. Seif, J. Holovsky, and C. Ballif Photovoltaics and Thin Film Electronics Laboratory, Institute of Microengineering (IMT), Ecole Polytechnique Fédérale de Lausanne (EPFL), Rue A.-L. Breguet 2, 2000 Neuchâtel, Switzerland Roth & Rau Switzerland SA, Rue de la...

Structural defects and hydrogen clustering in amorphous silicon

We have studied by small angle X-ray scattering the structural evolution on the atomic and nanoscale of hydrogenated amorphous silicon prepared both by ion implantation and by plasma-enhanced chemical vapor deposition and containing a similar H content. Results show that the initial structure of both samples is homogeneous on the nanoscale. Upon annealing, low-density features on the nanometer ...

Theoretical models of hydrogen-induced defects in amorphous silicon dioxide

Al-Moatasem El-Sayed,1,* Yannick Wimmer,2,† Wolfgang Goes,2,‡ Tibor Grasser,2,§ Valery V. Afanas’ev,3,‖ and Alexander L. Shluger1,¶ 1Department of Physics and Astronomy and London Centre for Nanotechnology, University College London, Gower Street, London, WC1E 6BT, United Kingdom 2Institute for Microelectronics, Technische Universität Wien, A-1040 Vienna, Austria 3Department of Physics, Univers...